摘要: 电子级磷酸是晶圆、薄膜液晶显示器生产不可或缺的关键清洗和蚀刻材料。随着芯片产业高端化发展，对电子级磷酸的要求越来越高。介绍了电子级磷酸的应用领域、质量标准和检测方法，综述了电子级磷酸的制备工艺及研究进展，阐述了相关方法的原理及优缺点，对我国电子级磷酸的研究与开发提出了建议。
关键词: 电子级磷酸；高纯磷酸；净化；湿电子化学品

Abstract: Electronic grade phosphoric acid is a crucial cleaning and etching material indispensable for the production of wafers and thin film LCD. The requirements for electronic grade phosphoric acid are getting higher and higher along with the high-end development of the chip industry. The paper introduces the application fields, quality standards and testing methods of electronic grade phosphoric acid, summarizes its preparation process and research progress, elaborates the philosophies and corresponding advantages and disadvantages of related methods, and puts forward suggestions for the research and development of electronic grade phosphoric acid in China.
Keywords: electronic grade phosphoric acid; high purity phosphoric acid; purification; wet electronic chemicals